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12 March 2019 A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices
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Proceedings Volume 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application; 110230C (2019) https://doi.org/10.1117/12.2518280
Event: Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 2018, Xi'an, China
Abstract
Based on multi-weld seam of image intensifier tube, we have designed the leak detection platform for high vacuum electron devices, the experimental result show that Helium injection method’s minimum leakage rate is 10-11Pa·m3/s, and pressed integration method’s minimum leakage rate less than 10-11Pa·m3/s, and it is of positive significance to improve the life of the device.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min Li, Xiao-jun Yang, Ying-Ping He, Tai-Min Zhang, Feng Liu, Zhuang Miao, Bei-Bei Liu, and Yao-Jin Cheng "A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices", Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110230C (12 March 2019); https://doi.org/10.1117/12.2518280
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