Design considerations of the FBAR on-board test

Xia-xi Xu; Yang Gao; Ting-ting Liu

doi:10.1117/12.2520350

12 March 2019 Design considerations of the FBAR on-board test

Xia-xi Xu, Yang Gao, Ting-ting Liu

Proceedings Volume 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application; 110234W (2019) https://doi.org/10.1117/12.2520350
Event: Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 2018, Xi'an, China

Abstract

With the increased performance requirements for film bulk acoustic resonator (FBAR) devices, accurate test of FBAR device parameters has become critical. The key of the FBAR on-board test is its test fixture structure and de-embedding methods. In this paper, the research status of FBAR board testing technology is reviewed. The parasitic effects, impedance matching and clamping design of the test fixture structure design process are discussed. The principle and error model of de-embedding and the advantages/disadvantages of each calibration method are analyzed. The accuracy of FBAR on-board test can be improved by reducing parasitic effects, optimizing impedance matching, improving calibration methods, and optimizing error model.

Citation Download Citation

Xia-xi Xu, Yang Gao, and Ting-ting Liu "Design considerations of the FBAR on-board test", Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110234W (12 March 2019); https://doi.org/10.1117/12.2520350

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