EUV reflective ellipsometry in laboratory: determination of the optical constants and phase retarder properties of SiO2 at hydrogen Lyman–alpha

Nadeem Ahmed; P. Nicolosi; A. E. H. Gaballah; K. Jimenez; P. Zuppella

doi:10.1117/12.2520834

26 April 2019 EUV reflective ellipsometry in laboratory: determination of the optical constants and phase retarder properties of SiO₂ at hydrogen Lyman–alpha

Nadeem Ahmed, P. Nicolosi, A. E. H. Gaballah, K. Jimenez, P. Zuppella

Author Affiliations +

Proceedings Volume 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI; 110320V (2019) https://doi.org/10.1117/12.2520834
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

The optical properties of thick silicon dioxide on silicon substrate SiO₂/Si were fully investigated at the hydrogen Lyman– alpha spectral line. In this case, it was observed that the reflectance measurements are not enough to determine reliable values of the optical constants, but a full polarimetric investigation is required. Thus, the optical constants were determined together with the phase retarder properties by combining EUV reflective ellipsometry and reflectometry. The experimental system used for the measurements is a reflectometer optimized for VUV–EUV spectral range and equipped with a linear rotating polarizer used as an analyzer. The results show the potential of the approach, suitable for cases in which the determination of the ellipsometric parameters, ratio ρ, and phase shift φ, is required for a complete study of the optical and structural properties of the samples. Moreover, it was found that SiO₂ behaves as a retarder by introducing a phase difference between the s-and p- polarization components of the incoming light. The phase shift ranges from 18° to 160° depending on the incidence angle. The method, the experimental measurements, the analysis and the results are discussed thereafter.

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Nadeem Ahmed, P. Nicolosi, A. E. H. Gaballah, K. Jimenez, and P. Zuppella "EUV reflective ellipsometry in laboratory: determination of the optical constants and phase retarder properties of SiO₂ at hydrogen Lyman–alpha", Proc. SPIE 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI, 110320V (26 April 2019); https://doi.org/10.1117/12.2520834

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