Modelling extreme ultraviolet ablation interactions

J. A. Lolley; S. A. Wilson; G. J. Tallents

doi:10.1117/12.2523137

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24 April 2019 Modelling extreme ultraviolet ablation interactions

J. A. Lolley, S. A. Wilson, G. J. Tallents

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Proceedings Volume 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII; 110350R (2019) https://doi.org/10.1117/12.2523137
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Compact extreme ultraviolet (EUV) laser sources can be used for laboratory-scale ablation experiments at intensities of 1 × 10¹¹ Wcm⁻² and higher. The depths of ablation achieved using focused laser output at 46.9 nm to irradiate solid targets of aluminum, gold, and copper have been modeled. Two simple models are considered; an adaptation of an ultra-short pulse model, and an ablation velocity model. We show that the attenuation length of the material plays an important role in the physics of the ablation. A more detailed one-dimensional model including absorption by inverse bremsstrahlung absorption and photo-ionization, corrected to include electron degeneracy effects, is used to evaluate the opacity of the ablation plasma and subsequent ablation depths.

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J. A. Lolley, S. A. Wilson, and G. J. Tallents "Modelling extreme ultraviolet ablation interactions", Proc. SPIE 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII, 110350R (24 April 2019); https://doi.org/10.1117/12.2523137

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