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24 January 2019 Realizing micro- and nano-optical bio sensors on chip
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Proceedings Volume 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems; 1104308 (2019) https://doi.org/10.1117/12.2502491
Event: Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2018, Skukuza, South Africa
Abstract
Si LEDs that operate in the reverse avalanche mode (Si AM LED) and forward bias (Si FB LED), offer various possibilities for realizing nano and micro biosensors directly on chip. The LEDs operate in 450 - 1100nm wavelength range, can emit up to 100nW of optical power, and can be fabricated in micro and nano dimensions. The dispersion characteristics has been studied for a Si AM LED source that is positioned one micron below silicon surface. Subsequently, a fluidic channel sensor device has been designed using the dispersion characteristics. Hence transmittance and absorption spectra studies of species that flow in a fluidic channel can be studied. Similarly, a waveguide-based sensor device has been designed where a receptor layer is fabricated on a waveguide on chip between a Si AM LED and a Si p-i-n detector. The receptor layer binds preferentially with a defined pathogen, and couples with the evanescent radiation of the waveguide.
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Timothy A. Okhai and Lukas W. Snyman "Realizing micro- and nano-optical bio sensors on chip", Proc. SPIE 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 1104308 (24 January 2019); https://doi.org/10.1117/12.2502491
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