Printed electronics MIM capacitor for a microsystem power supply

Jan C. Conradie; Kevin Land; Trudi-Heleen Joubert

doi:10.1117/12.2502522

24 January 2019 Printed electronics MIM capacitor for a microsystem power supply

Jan C. Conradie, Kevin Land, Trudi-Heleen Joubert

Proceedings Volume 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems; 110430E (2019) https://doi.org/10.1117/12.2502522
Event: Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2018, Skukuza, South Africa

Abstract

A Metal-Insulator-Metal (MIM) capacitor was inkjet-printed, using a dielectric ink (Ink-Epo-XP from MicroResist) based on SU-8 photo-resist, as well as silver nanoparticle ink (Harima NPS-J) for conductive features, which was integrated into a microsystem power supply. It was discovered that printing MIM capacitors on photo-paper had the most promising results in terms of acceptable capacitance density and flexibility, when compared to transparency and glass substrates. A core aspect considered in this project was the discovery of the workflows best suited to print MIM capacitors, which included using oxygen plasma treatment and the printing of various layers. Capacitors with values ranging between 10 and 50 pF were integrated into AC-DC and DC-DC converters. The AC-DC converter had a power output of up to 8.75 W with an output voltage of 5 V, whereas the DC-DC converters had outputs of up to 200 mW at voltages ranging between 1.8-3.3 V. The converters realised reached efficiencies of 80.77 % (AC-DC) and 70-92 % (DC-DC) respectively.

Citation Download Citation

Jan C. Conradie, Kevin Land, and Trudi-Heleen Joubert "Printed electronics MIM capacitor for a microsystem power supply", Proc. SPIE 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 110430E (24 January 2019); https://doi.org/10.1117/12.2502522

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