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24 January 2019 Mechanical deformation on nanoparticle-based thin-film transistors
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Proceedings Volume 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems; 1104315 (2019) https://doi.org/10.1117/12.2502393
Event: Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2018, Skukuza, South Africa
Abstract
Thin-film transistors (TFTs) are the pivotal elements driving electrical current in innovative systems. These applications emerge adding new functionalities to every-day products; therefore, new challenges are faced. Electric components in flexible displays, RFID tags, or electronics skin for health monitoring are subjected to a high degree of mechanical deformation. Nonetheless, the systems have to operate properly despite external influences. In this study, a brief review of the mechanical deformation on the electrical characteristics of nanoparticle-based TFTs is presented Conjointly, a case-of-study considering low-cost ZnO nanoparticle-based TFTs on PET substrate is analyzed. The TFTs were integrated on a freestanding substrate replicating a more realistic scenario for a later large-scale production. Fabrication steps with a maximum temperature of 120°C were employed availing the integration process to a wider range of substrates. As gate dielectric, a spin-on highk nanocomposite was selected in order to favor the mechanical stability of the layer as well as its permittivity. Moreover, the integration routine was adapted in order to reduce parasitic overlapping capacitances in the transistors. The TFTs were electrically characterized either in a flat state or under mechanical deformation, employing different bending directions as well as deformations parallel or perpendicular to the transistor channel.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fábio F. Vidor, Thorsten Meyers, Julia Reker, Kathrin Müller, Gilson I. Wirth, and Ulrich Hilleringmann "Mechanical deformation on nanoparticle-based thin-film transistors", Proc. SPIE 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 1104315 (24 January 2019); https://doi.org/10.1117/12.2502393
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