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14 February 2019 Refractive index insensitive temperature sensor based on a photonic crystal nanobeam cavity
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Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110484F (2019) https://doi.org/10.1117/12.2522602
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China
Abstract
We present an ambient refractive index (RI) insensitive temperature sensor based on a Silicon-on-Insulator (SOI) ellipse stack major axis modulated photonic crystal (PC) nanobeam cavity (EPCNC). The PC nanobeam cavity is covered with SU-8 cladding to increase the temperature sensitivity by taking advantage of the relatively high thermooptic (TO) coefficient of SU-8 cladding. Three dimensional finite-difference time-domain (3D-FDTD) simulations are used for our analysis. The results show that the sensitivity of temperature sensing is -108.9pm/K. In particular, the proposed sensor not only achieves a competitive temperature sensitivity, but also eliminates the influence of ambient RI on sensing. Therefore, the proposed sensor is potentially a promising platform for future application of temperature sensing.
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Xuepei Li, Chao Wang, Zheng Wang, Zhongyuan Fu, Fujun Sun, and Huiping Tian "Refractive index insensitive temperature sensor based on a photonic crystal nanobeam cavity", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110484F (14 February 2019); https://doi.org/10.1117/12.2522602
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