3D microtransformers with air core inside fused silica

Jinwei Duan; Qing Yang; Chao Shan; Feng Chen

doi:10.1117/12.2521945

24 January 2019 3D microtransformers with air core inside fused silica

Jinwei Duan, Qing Yang, Chao Shan, Feng Chen

Proceedings Volume 11052, Third International Conference on Photonics and Optical Engineering; 1105211 (2019) https://doi.org/10.1117/12.2521945
Event: The International Conference on Photonics and Optical Engineering, 2018, Xi'an, China

Abstract

We present a fabrication method for 3D microtransformers with air core inside silica glass by means of femtosecond-laser-wet-etching (FLWE) and metal-microsolidifying, for very high frequency applications. A fabricated transformer with 24turns of primary coil and 12 turns of secondary coil，yielded an inductance of 70nH and 55nH. The maximum transformer efficiency of 62% was measured at a load of 50 Ω. Finally, the embedded 3D micro-transformer can be easily integrated with other microelectrical, mechanical and optical systems, applying in MEMS, sensors and lab-on-chips.

Citation Download Citation

Jinwei Duan, Qing Yang, Chao Shan, and Feng Chen "3D microtransformers with air core inside fused silica", Proc. SPIE 11052, Third International Conference on Photonics and Optical Engineering, 1105211 (24 January 2019); https://doi.org/10.1117/12.2521945

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