All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics

Xiaobing Feng; Rong Su; Tuomas Happonen; Jian Liu; Richard Leach

doi:10.1117/12.2511140

7 March 2019 All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics

Xiaobing Feng, Rong Su, Tuomas Happonen, Jian Liu, Richard Leach

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105308 (2019) https://doi.org/10.1117/12.2511140
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

The increasing capabilities of roll-to-roll (R2R) printing processes present challenges for quality control, requiring inprocess inspection of large substrates with high resolution at high speed. In this paper, an all-optical difference engine (AODE) sensor has been developed for in-process defect inspection for R2R printed electronics. The AODE sensor achieves high-speed inspection by utilising the principle of coherent optical subtraction to minimise data processing. The capability of the developed sensor is demonstrated using industrial printed electrical circuity samples and the sensor is capable of inspecting areas of 4 mm width with a resolution of the order of several micrometres.

Citation Download Citation

Xiaobing Feng, Rong Su, Tuomas Happonen, Jian Liu, and Richard Leach "All-optical difference engine for in-process defect inspection for roll-to-roll printed electronics", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105308 (7 March 2019); https://doi.org/10.1117/12.2511140

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