An integrated linear time-grating displacement sensor with single alternating light field

Changli Li; Min Fu; Ge Zhu; Zhiwei Pu; Xiaoyu Yu; Shuangya Zhang

doi:10.1117/12.2509598

7 March 2019 An integrated linear time-grating displacement sensor with single alternating light field

Changli Li, Min Fu, Ge Zhu, Zhiwei Pu, Xiaoyu Yu, Shuangya Zhang

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110531A (2019) https://doi.org/10.1117/12.2509598
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

It is difficult to control consistency of light source and large volume in current linear time-grating displacement sensor with four-channel alternating light field. A novel integrated linear time-grating displacement measurement system with single alternating light field is proposed. Single alternating light field and micro-controlling phase-shift method are used to synthesize a signal of traveling wave. And the measurement of linear displacement is achieved by measuring a difference of zero-crossing time between a signal of traveling wave and a reference signal. Design of structural miniaturization, design of integrated circuit, design of transmitting surface of cosine and design of optimization of existing time-grating displacement sensor are analyzed in detail. According to measuring principle, manufacture of light source and photoelectric receiver are completed, and corresponding experimental platform is built. Experimental results indicate that the measuring errors of optimized sensor are reached within±0.2μm using grating pitch of 0.1mm in the measuring range of 100mm.

Citation Download Citation

Changli Li, Min Fu, Ge Zhu, Zhiwei Pu, Xiaoyu Yu, and Shuangya Zhang "An integrated linear time-grating displacement sensor with single alternating light field", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531A (7 March 2019); https://doi.org/10.1117/12.2509598

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