Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

Han Zhou; Bingkun Wu; Mingguang Shan; Lei Liu; Haichao Yu; Zhi Zhong; Bin Liu

doi:10.1117/12.2511691

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7 March 2019 Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm

Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Zhi Zhong, Bin Liu

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Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110531W (2019) https://doi.org/10.1117/12.2511691
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

An extrinsic Fabry-Perot interferometric fibre microphone based on polydimethylsiloxane, or PDMS, diaphragm was proposed. The large free-standing PDMS diaphragm, with a diameter of 4 mm, is prepared by a simple “spin-strip” process. The experimental result shows that the fabricated sensor has a high dynamic pressure sensitivity of about -136 dB re 1 rad/μPa in the range of 100~2000Hz. The noise equivalent acoustic signal level of the microphone, limited by the environmental noise, is about 1000 μPa/Hz^1/2. And the dynamic range is tested to be more than 47.48 dB. The proposed microphone is expected to be used in the field of weak acoustic pressure testing.

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Han Zhou, Bingkun Wu, Mingguang Shan, Lei Liu, Haichao Yu, Zhi Zhong, and Bin Liu "Optical fiber Fabry-Perot acoustic sensor based on large PDMS diaphragm", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110531W (7 March 2019); https://doi.org/10.1117/12.2511691

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