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7 March 2019 Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography
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Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105337 (2019) https://doi.org/10.1117/12.2512097
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China
Abstract
A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pingping Jia, Hong Zhao II, Yuwei Qin III, Meiqi Fang IV, and Xiaopeng Guo V "Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105337 (7 March 2019); https://doi.org/10.1117/12.2512097
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