A differential giant magnetostrictive mitro-displacement actuator

Jing Wang; Lei Wang; Yixin Li; Junzhong Li; Xaioyu Zhu

doi:10.1117/12.2512315

7 March 2019 A differential giant magnetostrictive mitro-displacement actuator

Jing Wang, Lei Wang, Yixin Li, Junzhong Li, Xaioyu Zhu

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 110533Z (2019) https://doi.org/10.1117/12.2512315
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

Actuators made of Giant Magnetostrictive Material (GMM) are used more and more widely in ultra-precision positioning, processing, measurement, and vibration isolation of equipment. While a single Giant Magnetostrictive Actuator (GMA) has low load capacity and non-ideal dynamic output characteristics, this paper presents a differential Giant Magnetostrictive Mitro-Displacement Actuator. The effect of the equivalent stiffness and quality of the load on the output characteristics of the actuator is analyzed by establishing the dynamic model of differential GMA. The experimental results show that compared to a single GMA micro-displacement actuator system, the differential GMA system has a positioning noise of ±3 nm, a resolution of 6 nm within a 18.5μm travel range. In the composite control system, a hysteresis-free sinusoidal displacement output with an amplitude of 3μm within 200 Hz is realized, and the maximum output error is 0.6μm, which effectively improves the dynamic performance of the actuator and improves the load capacity of the actuator.

Citation Download Citation

Jing Wang, Lei Wang, Yixin Li, Junzhong Li, and Xaioyu Zhu "A differential giant magnetostrictive mitro-displacement actuator", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 110533Z (7 March 2019); https://doi.org/10.1117/12.2512315

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