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The papers in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. Additional papers and presentation recordings may be available online in the SPIE Digital Library at SPIEDigitalLibrary.org. The papers reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from these proceedings: Author(s), “Title of Paper,” in Optical Measurement Systems for Industrial Inspection XI, edited by Peter Lehmann, Wolfgang Osten, Armando Albertazzi Gonçalves Jr., Proceedings of SPIE Vol. 11056 (SPIE, Bellingham, WA, 2019) Seven-digit Article CID Number. ISSN: 0277-786X ISSN: 1996-756X (electronic) ISBN: 9781510627918 ISBN: 9781510627925 (electronic) Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2019, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $21.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/19/$21.00. Printed in the United States of America by Curran Associates, Inc., under license from SPIE. Publication of record for individual papers is online in the SPIE Digital Library.
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AuthorsNumbers in the index correspond to the last two digits of the seven-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first five digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Acher, Olivier, 2O Aguirre-Aguirre, Daniel, 1O Ahlers, K., 0S Aichert, D., 3F Aizu, Yoshihisa, 3G Aketagawa, Masato, 0F Albertazzi G., Armando, 0H, 21, 2N, 49 An, S. Y., 3J Anisimov, Andrei G., 0J Antoine, P., 19 Aoki, N., 3R Arai, Y., 0B Arstila, Timo, 0Q, 0S Artigas, Roger, 0W Ayubi, Gastón A., 45 Babovsky, Holger, 17 Bae, Jaeseok, 04, 1R Bahr, Leo A., 1U Bai, Qian, 2B Baldo, Crhistian R., 2N Barandak, A., 2K, 30 Baroud, Yousef, 13 Barrera, Estiven S., 0H, 21, 2N Baselt, T., 1T Batshev, Vladislav I., 2W, 3T Beermann, Rüdiger, 14 Béguelin, Jeremy, 0Z Beisswanger, Rolf, 1G Belkner, Johannes, 11 Benedet, Mauro E., 0H, 21 Bermudez, Carlos, 0W Berndt, Dirk, 48 Bertz, A., 0V Besaga, Vira R., 2I Binkele, Tobias, 1N Birli, Oliver, 0L Blain, P., 0G, 0I Blalock, Todd, 1H Blättermann, Alexander, 20 Blödorn, Rodrigo, 49 Blohm, Werner, 1B Blug, A., 0V Blumröder, Ulrike, 0L Böhler, Mario, 1V Boing, Denis, 49 Bolbasova, L. A., 3D Boonen, Laura, 1Y Borges, Vicente K., 2U Borguet, B., 19 Bortoli, Tiago, 21 Boussemaere, L., 19 Bouwens, A., 19 Braeuer, Andreas S., 1U Brand, Andreas A., 1V Brandenburg, Albrecht, 1X, 20 Bräuer-Burchardt, Christian, 17 Budnev, A. Y., 3Z Burada, Dali R., 47, 4B Cadevall, Cristina, 0W Cai, Zewei, 28 Cao, Chunyan, 2Q, 2S Cao, Jinjin, 3L Carl, D., 0V Chang Chien, Kuang-Che, 06 Charrett, Thomas O. H., 0K, 3K Chen, Hu, 2Q, 2S Chen, Jian, 27, 2G Chen, Liang-Chia, 11 Cheng, Chau-Jern, 06 Chertov, Aleksander N., 2V Claussen, Gunnar, 1B Clermont, L., 1D Coggrave, Charles R., 07 Cornejo-Rodriguez, Alejandro, 1O Coupland, Jeremy, 07 Cox, Brittany, 1H de Groot, Peter, 0X de Oliveira, Bernardo C. F., 2N, 2U Deck, Leslie, 0X Denisov, D. G., 3Z Domken, I., 1D Dong, Liquan, 3B Dong, Xingchen, 1P, 1S Drozdova, Daria A., 2Y Druzhin, Vladislav, 4C Dubrov, A. V., 32, 33 Dubrov, V. D., 32, 33 Dziubecka, Helena, 03, 05 Eberl, C., 0V Eckmann, S., 0V Egorov, D. I., 36 Ehret, Gerd, 2D Eifler, Matthias, 0Y, 23 Endo, Katsuyoshi, 0D Ermacora, Denis, 24 Essameldin, Mahmoud, 1N Fan, Chen, 46 Fang, Meiqi, 2C Fantin, Analucia V., 0H, 21 Faulhaber, Andreas, 13 Fischer, B., 22 Fleischmann, Friedrich, 1N Flury, Manuel, 0R Fontanot, Tommaso, 24 Ford, Helen D., 10 Francis, Daniel, 10 Freischlad, Klaus, 0A Fröhlich, Herberth B., 2N Fröhlich, Thomas, 0L Frommknecht, Andreas, 1Y Fu, Peng, 43 Fukuda, Hiroshi, 2R Funamizu, Hideki, 3G Furukawa, Hideaki, 44 Füßl, Roland, 0L Garcia-Armenta, Jorge, 07 Gavlina, Alexandra E., 3T Georges, M., 0G, 0I Gerhardt, Nils C., 2I Ghim, Young-Sik, 31 Ghosh, A., 47 Gibson, Sam J., 0K Giessen, Harald, 0M Glanz, Carsten, 1Y Glaser, Tilman, 1C Głomb, Grzegorz, 3S, 3X Glukhov, Yuriy, 29 Gorevoy, Alexey V., 2W Granados-Agustin, Fermín Salomón, 1O Gritsuta, A. N., 3D Gronle, Marc, 13 Gröschl, Andreas C., 0N Grosse, C. U., 22 Groves, Roger M., 0J Gu, Feifei, 3M Guo, Dongming, 2B Hæggström, Edward, 0Q, 0S Hagemeier, Sebastian, 3I Haist, Tobias, 13 Hallam, Jonathan M., 10 Han, S.-H., 3J Harsch, Antonia, 1G Hartmann, P., 1T, 25 Hashimoto, Kota, 0D Hashimoto, Takahiro, 44 Hausotte, Tino, 0N, 16 He, Huayang, 3L He, Wenqi, 28 Heist, Stefan, 15, 17 Henning, Thomas, 1N Hering, Julian, 0Y Herkommer, Alois, 0M Higuchi, Masato, 0F Hilbig, David, 1N Hofmann, Martin, 37 Hofmann, Martin R., 2I Holz, Philipp, 1X Horsten, R. C., 1A Hošek, J., 2Z Hoshikawa, Masaharu, 44 Hou, Qingkai, 2S, 3U Hu, Fei, 43 Hu, Guohang, 3H Hu, Yan, 43 Huang, Ming, 27, 2G Huber, Franz J. T., 1U Hui, Mei, 3B Hurník, Jakub, 35 Ishii, Katsuhiro, 44 Ishikawa, T., 3R Ivanov, Branimir, 2E Jacobs, J., 1D Jakobi, Martin, 1S, 3O Järvinen, M., 0S Jha, Sunil, 4B Jia, Pingping, 2C Jiang, Hongzhi, 3N Jin, Jonghan, 04, 1R Kabardiadi-Virkovski, A., 1T, 25 Kahl, Michael, 1Z Kaidarakova, Victoria, 4C Kang, J.-W., 42 Kang, Jungmin, 0D Karar, Vinod, 4B Karatas, Abdullah, 23 Kassamakov, Ivan, 0Q, 0S Kästner, Markus, 14 Kazakov, Vasily I., 3A, 3W Khan, Gufran S., 47, 4B Khokhlov, Demid D., 2W Kienle, Patrick, 1P, 3O Kihm, H., 42 Kim, S.-B., 3J Kirchner, Johannes, 37 Kirkove, M., 0G Kissinger, Thomas, 0C, 0E, 3K Kitayama, Takao, 0D Kizaki, Ryo, 0D Koch, Alexander W., 1P, 1S, 3O Koch, Felix, 1C Köchert, Paul, 0L Köhler, Michael H., 1P, 1S, 3O Kolenov, D., 1A Koliopoulos, Chris, 0A Kölsch, Dorothea, 23 Konyakhin, Igor A., 2J, 2X, 39 Korotaev, Valery V., 2H, 2V Kovalev, Michael, 29 Kowarschik, Richard, 17 Kozacki, Tomasz, 2T, 3P Kozlowski, Peter, 20 Krasin, George, 29 Kühmstedt, Peter, 15 Kumar, Manoj, 38, 3Q Landmann, Martin, 15 Lang, Walter, 1N Latifi, H., 2K, 30 Lavrinov, V. V., 3D Layh, Michael, 0M Lecler, Sylvain, 0R Lee, H. J., 3J Lehmann, Peter, 0T, 2D, 3I Leng, Zhengwei, 3L Lequesne, C., 0I Li, Dawei, 3H Li, Jun, 3M Li, Ruxin, 2M Li, Xudong, 3N Liao, Meihua, 28 Liao, Zaibo, 2Q Lindlein, N., 1F Linghu, Changxiang, 2Q, 2S Liu, Beibei, 41 Liu, Hsiu-Wen, 11 Liu, Jing, 41 Liu, Shijie, 27, 2G Liu, Xiaoli, 28 Lobanova, Anastasiya Y., 2Y Lou, Zhiyuan, 2M Lu, Qi, 27 Lukin, V. P., 3D Lvova, Ksenia, 4C Machikhin, Alexander S., 2W Maconi, Göran, 0Q, 0S Maeda, Yoshiho, 2R Makino, Takeshi, 44 Manske, Eberhard, 0L, 11, 37 Mantel, K., 1F Maraev, Anton A., 2H Marbach, Sébastien, 0R Marcellino, Guilherme C., 2U Marcotte, S., 1D Marquet, B., 1D Martinez, Pol, 0W Martinez-Carranza, Juan, 3P Mastylo, Rostyslav, 0L Matsuo, Shinji, 2R Mazy, E., 1D Mednikov, Sergey V., 2V Meister, Andreas, 0L Mendoza-Santoyo, Fernando, 38, 3Q Metzner, Sebastian, 16 Meyer, Fabian, 1V Michel, C., 1D Mikš, A., 3V Mikuła, Marta, 3P Minh, Dinh B., 2H Mishra, Vinod, 4B Mitchell, John B., 0U Mitrofanov, Sergey S., 40 Miura, Toru, 2R MohanPant, Lalit, 47 Montgomery, Paul, 0R Moreau, V., 19 Moskaletz, Oleg D., 3A, 3W Myer, Brian, 1H Nallar, Elif, 3O Nassim, Abdelkrim, 38, 3Q Nekarda, Jan F., 1V Nekrylov, Ivan S., 2F, 2H, 2V Neumann, M., 1T Nguyen, Thanh-Liem, 2O Nguyen, The Thien, 1P Ninca, I., 0S Noell, Wilfried, 0Z Nogin, Anton A., 39 Nolvi, A., 0S Notni, Gunther, 15, 18 Novák, J., 3V Novák, P., 3V Novikov, Denis A., 3T Odinokov, Sergey, 29 Oh, Kwan-Jung, 2E Ortlepp, Ingo, 0L Osten, Wolfgang, 13, 1G, 28 Ostendorf, Andreas, 2I Özdemir, B., 3F Paloušek, David, 35 Pant, Kamal K., 47, 4B Paraskun, A. S., 3W Park, Ian S., 07 Park, Joongki, 2E Park, Jungjae, 04, 1R Paroni, Sara, 24 Pedrini, Giancarlo, 28 Peng, Xiang, 28 Peng, Xiaocong, 3H Percino-Zacarías, María Elizabeth, 1O Pereira, S. F., 1A Perevoznikova, Anastasiia, 4C Perrin, Stephane, 0R Pham, Ngoc Tuan, 2F Pinto, Tiago L. F. C., 2U Pinzer, Bernd, 0M Pokorný, P., 3V Portnova, V. E., 4A Povarov, Kirill S., 40 Prause, Korbinian, 0M Prosovskii, O. F., 3Z Prosovskii, Y. O., 3Z Pruss, Christof, 0L, 13, 1G Puder, Th., 25 Qin, Yuwei, 2C Quentin, Lorenz, 14 Raatikainen, P., 0S Raducci, Sebastian, 24 Rangelow, Ivo W., 37 Ranjbar-Naeini, O. R., 2K, 30 Rees, Paul C. T., 0U Regina, D. J., 0V Reichel, S., 3F Reithmeier, Eduard, 14 Rhee, Hyug-Gyo, 31 Riebeling, Joerg, 2D Rinner, Stefan J., 1Z Roberts, Gareth Wyn, 0U Rodrigues, Joel J. P. C., 2V Rosenberger, Maik, 18 Rothau, S., 1F Rudek, F., 25 Ruiz, Pablo D., 07 Rus, J., 22 Ryzhova, Victoria A., 2Y Saetchnikov, Anton V., 2I Sakhariyanova, Aiganym M., 39 Salehi-Moghadam, Mohammadreza, 2K Salido-Monzú, David, 1Q Schake, Markus, 0T Scharf, Torald, 0Z Schaude, Janik, 0N Schäufele, T., 3F Schmauder, Martin, 1Y Schmid, Hubert, 1Z Schmidt, Michael, 0X Schmidt, Samuel, 23 Schmitt, Robert, 2N Schnabel, Mike, 1C Schober, Christian, 1G Schütz, Jan, 20 Schwesinger, Folker, 0L Schwider, J., 1F Seewig, Jörg, 0Y, 23 Selin, A. A., 3D Senn, M., 0V Sergeeva, Maria V., 3T Shakher, Chandra, 47 Shao, Jianda, 27, 2G, 3H Sharshavina, K., 19 Shin, O., 3J Simon, Sven, 13 Simonetti, Giulio, 24 Sinzinger, Stefan, 37 Skupsch, Christoph, 48 Šmejkal, F., 3V Smirnov, N. V., 4A Soin, E. L., 3D Song, W., 3J Song, Zhan, 3M Söylemez, H., 3F Stankic, D., 3F Stark, Andreas, 17 Stockman, Y., 1D Stoykova, Elena, 2E Ströer, Felix, 0Y Stsepuro, Nikita, 29 Styk, Adam, 03, 05 Su, Jinlong, 43 Su, Wenying, 3L Supreeti, Shraddha, 37 Suski, Damian, 2T Świrniak, Grzegorz, 3S, 3X Tahmasebi, M. M., 30 Takamasu, Kiyoshi, 0D Tang, Qiyong, 2Q Tatam, Ralph P., 0C, 0E, 0K, 10, 3K Taudt, Ch., 25 Thiele, Simon, 0M Timofeev, Alexander N., 2F, 2V Tong, Minh Hoa, 2J Tounsi, Yassine, 38, 3Q Toyoshi, Yui, 0D Tu, Han-Yen, 06 Uozumi, Jun, 3G Vaganov, Mikhail A., 3A, 3W Vainikka, T., 0Q, 0S Vandenrijt, J.-F., 0G, 0I Vasilev, Gleb, 2X Vasileva, Anna V., 2H Ventura, Luiz G. M., 48 Vesselli, Erik, 24 Villalobos-Mendoza, Brenda, 1O Viotti, Matias R., 49 Voelkel, Reinhard, 0Z von Freymann, Georg, 0Y Wada, Naoya, 44 Wang, Fuyin, 2S, 3U Wang, Shenghao, 2G Wang, YiQi, 2B Wang, Yunfan, 3N Wei, Dong, 0F Weidenfeller, Laura, 37 Wieser, Andreas, 1Q Will, Stefan, 1U Willemann, Daniel P., 0H, 21 Winarno, Agustinus, 0D Winkler, Y., 1T Winnik, Julianna, 2T Wiseman, Kieran B., 0C Wolschke, Steffen, 48 Wong, Eugene, 17 Wu, Hongfei, 43 Wu, Jiaqi, 2M Wu, Zhouling, 27, 2G Xiong, H., 0I Xiong, Shuidong, 2Q, 2S, 3U Xu, Pei, 3M Xu, Xueke, 27 Xu, Yang, 3N Xu, Zhizhan, 2M Yamamura, Kazuya, 0D Yan, Ying, 2B Yang, H.-S., 42 Yao, Qiong, 2S, 3U Yaryshev, Sergey N., 2H Ylitalo, T., 0S Yokota, M., 3R Zatocilová, Aneta, 35 Zavalov, Y. N., 32, 33 Zeng, Zhinan, 2M Zhang, Chen, 18 Zhang, Hangying, 46 Zhang, Jinning, 3L Zhang, Long, 3H Zhang, Lu, 3B Zhang, Luyao, 2M Zhang, Weihua, 2Q Zhao, Hong, 2C, 46 Zhao, Huijie, 3N Zhao, Jinlei, 2C, 46 Zhao, Juan, 3M Zhao, Linjie, 2B Zhao, Weirui, 3B Zhao, Y., 0G Zhao, Yuan’an, 3H Zhao, Yuejin, 3B Zhao, Zixin, 46 Zheng, Yinghui, 2M Zhou, Guoqing, 41 Zhou, Ping, 2B Zhou, Yishu, 3L Zhou, You, 27 Zilk, Matthias, 1C Ziolek, Carsten, 1Z Conference CommitteeSymposium Chairs
Conference Chair Conference CoChairs
Conference Programme Committee
Session Chairs
IntroductionCompared to many other conferences the “Optical metrology systems for industrial inspection XI” has a long and successful tradition of bringing together scientists from academia and industry exchanging their knowledge and discussing new trends, applications and developments in optical metrology. This year the conference takes place for the eleventh time, meaning that the first conference was held already 20 years ago. Until today, this event is an essential part of the biannual Munich SPIE symposium “Optical Metrology” and the “LASER Word of Photonics Congress” at all. As before, applications of optical metrology in nearly all relevant fields of industrial production will be covered, ranging from high-precision techniques and resolution enhancement to novel measurement systems that may be used in industrial production lines. This impressively demonstrates that the acquisition of knowledge based on reliable measurement data is one of the most important prerequisites to stimulate sustainable progress in industrial manufacturing. However, the trend towards optical metrology is also driven by an increasing use of optical components and systems such as cameras, light sources, and computing power in consumer electronics products and applications. This helps optical metrology to profit from recent developments and to hold its position as one of the most dynamic fields of measurement technology, dedicated to acquire relevant data effectively in order to control, assess, and improve industrial products and processes. Again, the Munich conference provides an excellent forum of international scientific exchange and discussion of the latest results. More than 160 submissions impressively demonstrate that, even after 20 years, the industrial inspection conference series remains a remarkable event for researchers working in optical metrology all over the world. With 77 oral presentations and more than 80 posters the 2019 conference could hold, at same time, the high number and the outstanding level of contributions which builds the basis of its long-term success. As in previous years, a significant number of submissions deals with optical measurement of geometrical features. A field of application of maintaining interest is the measurement of optical components, e.g. aspheres, free-form surfaces, and optical systems. Therefore, the traditional joint sessions with the EOS Conference on Manufacturing and Testing of Optical Components will be continued. Since spectroscopic applications still are of growing interest for the acquisition of multimodal data even in industrial inspection, a session “Hyperspectral Imaging and Spectroscopic Techniques” was added this year. Also the invited talks of the conference should be highlighted. Special thanks are due to the distinguished invited speakers, namely Peter de Groot (Zygo), Eberhard Manske (TU Ilmenau), Bernd Bodermann (PTB), Jan Burke (Fraunhofer IOSB), and Rainer Schuhmann (Berliner Glas) for their stimulating lectures. We would like to express our sincere gratitude also to the members of the program committee for their support of the conference. Additionally, many thanks are due to the SPIE staff for their professional and cooperative work during the conference organization and the preparation of this proceedings volume. Finally, we would like to thank all authors, who not only fill the conference with life but give added value to the community by contributing to this proceedings volume. Peter Lehmann Wolfgang Osten Armando Albertazzi Gonçalves Jr. |
