Advanced methods for optical nanometrology (Conference Presentation)

Bernd Bodermann

doi:10.1117/12.2531868

16 August 2019 Advanced methods for optical nanometrology (Conference Presentation)

Bernd Bodermann

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110560P (2019) https://doi.org/10.1117/12.2531868
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

This Conference Presentation, "Advanced methods for optical nanometrology," was recorded at SPIE Optical Metrology 2019 held in Munich, Germany.

Conference Presentation

Citation Download Citation

Bernd Bodermann "Advanced methods for optical nanometrology (Conference Presentation)", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560P (16 August 2019); https://doi.org/10.1117/12.2531868

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