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21 June 2019 Double pulse LED illumination for phase detection in RGB-interferometry
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Abstract
This contribution considers the application of pulsed LED illumination, synchronized with the exposure gap of a CMOS Bayer camera and an oscillating reference mirror, to record two π/2 phase shifted interferograms for quadrature based phase retrieval. Measurements of a superfine roughness standard in lateral motion are presented, demonstrating the capability of the setup to record the surface topography of moving objects. The application of the interferometric measurement data to calibrate a topography measuring wave front sensor, which is employed to support surface unwrapping is also discussed.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Markus Schake and Peter Lehmann "Double pulse LED illumination for phase detection in RGB-interferometry", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560T (21 June 2019); https://doi.org/10.1117/12.2525331
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