Design and fabrication of opto-mechanical micro polymeric cantilever based optical fiber sensor

O. R. Ranjbar-Naeini; Mohammadreza Salehi Moghadam; A. Barandak; H. Latifi

doi:10.1117/12.2526148

21 June 2019 Design and fabrication of opto-mechanical micro polymeric cantilever based optical fiber sensor

O. R. Ranjbar-Naeini, Mohammadreza Salehi Moghadam, A. Barandak, H. Latifi

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110562K (2019) https://doi.org/10.1117/12.2526148
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

In this paper, a micro-opto-mechanical polymeric cantilever based Fabry Perot Interferometer(CFPI) is reported as an optical fiber sensor. To be able to fabricate the sensor, a mold for the polymeric cantilever was fabricated using poly methyl methacrylate (PMMA) and with which a polydimethylsiloxane (PDMS) cantilever was constructed. After releasing the cantilever from the mold, cantilever and SMF were integrated together. As a result, a cavity was formed between SMF cleaved end and cantilever surface. When vibration is applied, the distance between the cantilever free end and cleaved end SMF changes, consequently the optical patch length of the sensor structure altered dynamically. Here, the effect of different frequencies and their amplitudes on the sensor spectrum is studied by using FFT and STFT analysis method.

Citation Download Citation

O. R. Ranjbar-Naeini, Mohammadreza Salehi Moghadam, A. Barandak, and H. Latifi "Design and fabrication of opto-mechanical micro polymeric cantilever based optical fiber sensor", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110562K (21 June 2019); https://doi.org/10.1117/12.2526148

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available