Original methods of aberration correction in optical systems of autocollimators

D. I. Egorov

doi:10.1117/12.2527954

21 June 2019 Original methods of aberration correction in optical systems of autocollimators

D. I. Egorov

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 1105636 (2019) https://doi.org/10.1117/12.2527954
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

Our paper presents the main results of the research and development of an optical scheme of the autocollimator to control the deflector rotation angles. We have performed a literature review of existing schemes basic devices, the peculiarities of their work, the scope, the analysis of the advantages and disadvantages of existing devices. The main difficulty in the development of the optical scheme of the autocollimator in our study is the high requirement for the accuracy of the calculation of the deflector rotation angles and the processing speed of the measurement data. We have sold this problem by reducing the size of the image of the autocollimation spot to a few micrometers and the normal distribution of energy within the image in the entire range of angular fields of the device. We are presenting the original methods of aberration correction of the autocollimator optical system due to the use of optical surfaces with special properties.

Citation Download Citation

D. I. Egorov "Original methods of aberration correction in optical systems of autocollimators", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 1105636 (21 June 2019); https://doi.org/10.1117/12.2527954

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KEYWORDS

Autocollimators

Image quality

Collimators

Monochromatic aberrations

Aberration correction

Autocollimation

Diffraction

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