Removal of particle contaminations on sol-gel coated fused silica surface by laser cleaning

Jingxuan Wang; Naihao Guo; Jihua Zhang; Wei Liao; Xia Xiang; Xiaodong Jiang

doi:10.1117/12.2539597

8 July 2019 Removal of particle contaminations on sol-gel coated fused silica surface by laser cleaning

Jingxuan Wang, Naihao Guo, Jihua Zhang, Wei Liao, Xia Xiang, Xiaodong Jiang

Proceedings Volume 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers; 110630B (2019) https://doi.org/10.1117/12.2539597
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

Efficient removal of SiO₂ contaminated particles from sol-gel SiO₂ filmed fused silica surface was achieved by single shot dry laser cleaning and airflow displacement system assisted laser cleaning using a Q switched Nd:YAG pulse laser at 355 nm in wavelength. The experiment result shows that for single-shot laser dry cleaning of sol-gel film fused silica samples under the condition of satisfying the theoretical cleaning threshold, the optimal laser energy density was 2.28 J/cm², which is different from the process parameters of uncoated fused silica. In the optimal process parameters, single shot laser cleaning had obvious cleaning effect on SiO₂ particles with particle diameter larger than 1 μm, and the removal ratio was 64.81%. When the density of particle was too high, the cleaning effect was weakened and the damage to the substrate was caused. The re-attachment of crushed particles also leaded to making the cleaning effect worse. The airflow displacement system assisted laser cleaning method further enhanced the effect of removing the optical surface contaminated particles and the decontamination efficiency was improved to 80.53% at 1.71 J/cm². Our results demonstrated that airflow displacement system will be useful for single shot dry laser cleaning of SiO₂ particles on an optical surface of fused silica.

Citation Download Citation

Jingxuan Wang, Naihao Guo, Jihua Zhang, Wei Liao, Xia Xiang, and Xiaodong Jiang "Removal of particle contaminations on sol-gel coated fused silica surface by laser cleaning", Proc. SPIE 11063, Pacific Rim Laser Damage 2019: Optical Materials for High-Power Lasers, 110630B (8 July 2019); https://doi.org/10.1117/12.2539597

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KEYWORDS

Particles

Silica

Laser energy

Sol-gels

Laser systems engineering

Pulsed laser operation

Laser applications

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