Positive and negative properties of laser heat-mode resists

Guodong Chen; Kui Zhang; Zhengwei Wang; Yang Wang; Jingsong Wei

doi:10.1117/12.2539689

8 July 2019 Positive and negative properties of laser heat-mode resists

Guodong Chen, Kui Zhang, Zhengwei Wang, Yang Wang, Jingsong Wei

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640D (2019) https://doi.org/10.1117/12.2539689
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

The GeSbTe (GST) thin films are usually used as optical and electronic data recording materials. In this work, the GST thin films were used as both negative and positive resists, and the positive and negative tone pattern structures were fabricated on the GST thin films, accordingly. The GST films were first deposited on the substrate, then the laser exposures were conducted through a focused laser beam spot. For negative resist, a Tetramethyl ammonium hydroxide (TMAH) was used as developing solution. For positive resist, (NH₄)₂S was used as developing solution. The structure heights of positive and negative resists are 53 nm and 180 nm were obtained, respectively. This work provides an effective method for fabricating the micro/nanostructures of optical and electronic elements.

Citation Download Citation

Guodong Chen, Kui Zhang, Zhengwei Wang, Yang Wang, and Jingsong Wei "Positive and negative properties of laser heat-mode resists", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640D (8 July 2019); https://doi.org/10.1117/12.2539689

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