Processing technology of magnetorheological finishing for large-aperture optical components

Jing Hou; Xianhua Chen; Jie Li; Bo Zhong; Wen-hui Deng; Nan Zheng

doi:10.1117/12.2524540

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10 May 2019 Processing technology of magnetorheological finishing for large-aperture optical components

Jing Hou, Xianhua Chen, Jie Li, Bo Zhong, Wen-hui Deng, Nan Zheng

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Proceedings Volume 11068, Second Symposium on Novel Technology of X-Ray Imaging; 110681I (2019) https://doi.org/10.1117/12.2524540
Event: Second Symposium on Novel Technology of X-Ray Imaging, 2018, Hefei, China

Abstract

Magnetorheological finishing (MRF) is a deterministic optical element polishing method that achieves material removal by means of the sheared and rheo-logical behavior of magnetorheological fluids. To realize high precision fabrication of large-aperture optical components, MRF technology had been explored in this paper. The main factors affecting the removal efficiency were investigated by orthogonal experiment. It indicated that the influence of the immersion depth and the thickness of ribbon on removal efficiency was more remarkable than the other parameters. The process of MRF machining component is established. Finally, the 590mm × 400mm plane optical element are manufactured using the MRF, and the result are very good.

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Jing Hou, Xianhua Chen, Jie Li, Bo Zhong, Wen-hui Deng, and Nan Zheng "Processing technology of magnetorheological finishing for large-aperture optical components", Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681I (10 May 2019); https://doi.org/10.1117/12.2524540

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