III-nitride emitters and detectors for UV optoelectronic applications grown by metalorganic chemical vapor deposition

Russell D. Dupuis; Theeradetch Detchprohm; Hi-Hee Ji; Marzieh Bakhtiary-Noodeh; Hoon Jeong; Ping Chen; Shyh-Chiang Shen; Chuan-Wei Tsou; Karan Mehta; P. Douglas Yoder

doi:10.1117/12.2540048

9 September 2019 III-nitride emitters and detectors for UV optoelectronic applications grown by metalorganic chemical vapor deposition

Russell D. Dupuis, Theeradetch Detchprohm, Hi-Hee Ji, Marzieh Bakhtiary-Noodeh, Hoon Jeong, Ping Chen, Shyh-Chiang Shen, Chuan-Wei Tsou, Karan Mehta, P. Douglas Yoder

Author Affiliations +

Proceedings Volume 11086, UV and Higher Energy Photonics: From Materials to Applications 2019; 110860C (2019) https://doi.org/10.1117/12.2540048
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

We report the current progress of our development of near-ultraviolet (NUV) III-nitride vertical-cavity LED emitters and avalanche photodetectors grown by metalorganic chemical vapor deposition (MOCVD). The III-N emitters are designed to be UV vertical-cavity surface-emitting lasers operating at 369.5nm. We describe the development of the growth and processing of an air-gap/AlGaN distributed Bragg reflector (DBR) consisting of five-pairs of quarter-wavelength layers of Al_0.12Ga_0.88N and air-gap regions created by selective chemical etching. A 4-6λ cavity was employed in the laser structure. We also report on the electrical and optical emission characteristics of these microcavity emitters. The photodetectors are GaN- and AlGaN-based p-i-n avalanche photodiodes (APDs) designed for front-side illumination. We report on the electrical and optical detection characteristics of these photodetectors.

Citation Download Citation

Russell D. Dupuis, Theeradetch Detchprohm, Hi-Hee Ji, Marzieh Bakhtiary-Noodeh, Hoon Jeong, Ping Chen, Shyh-Chiang Shen, Chuan-Wei Tsou, Karan Mehta, and P. Douglas Yoder "III-nitride emitters and detectors for UV optoelectronic applications grown by metalorganic chemical vapor deposition", Proc. SPIE 11086, UV and Higher Energy Photonics: From Materials to Applications 2019, 110860C (9 September 2019); https://doi.org/10.1117/12.2540048

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available