Electromagnetic analysis of three-dimensional shape measurement method based on speckle interferometry for fine structure by detecting phase distribution

Y. Arai

doi:10.1117/12.2528297

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3 September 2019 Electromagnetic analysis of three-dimensional shape measurement method based on speckle interferometry for fine structure by detecting phase distribution

Y. Arai

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Proceedings Volume 11102, Applied Optical Metrology III; 1110203 (2019) https://doi.org/10.1117/12.2528297
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

In the measurement of three-dimensional structure beyond the diffraction limit of the objective using the speckle interferometry, it has been reported that the shape of a measurement object can be measured by detecting the change of phase distribution generated by a lateral shift of the object. In this method, it is a feature that the focused image of the measured object is not required by using a scattering light. In this paper, the principle of this method is investigated by using electromagnetic analysis. Even if the three-dimensional structure is beyond the diffraction limit of the objective lens, it is confirmed that the three-dimensional shape can be measured by using the scattering light as the illumination light.

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Y. Arai "Electromagnetic analysis of three-dimensional shape measurement method based on speckle interferometry for fine structure by detecting phase distribution", Proc. SPIE 11102, Applied Optical Metrology III, 1110203 (3 September 2019); https://doi.org/10.1117/12.2528297

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