Translator Disclaimer
Presentation + Paper
3 September 2019 High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy
Author Affiliations +
Abstract
Surfaces featuring complex topographies, such as high slope angles, large curvatures and high aspect-ratio structures on both macro- and micro-scales, present significant challenges to optical measuring instruments. Here we demonstrate a method to characterise and correct the three-dimensional surface transfer function (3D STF) of a coherence scanning interferometer (CSI). Slope-dependent errors present in the original measurements are reduced after phase inversion of the 3D STF, and the final results agree with traceable contact stylus measurements within the 30 nm reproducibility of the stylus measurements. This method enables in-situ compensation for errors related to aberrations, defocus and diffraction.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rong Su, Matthew Thomas, Mingyu Liu, Jeremy Coupland, and Richard Leach "High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy", Proc. SPIE 11102, Applied Optical Metrology III, 1110205 (3 September 2019); https://doi.org/10.1117/12.2528911
PROCEEDINGS
7 PAGES + PRESENTATION

SHARE
Advertisement
Advertisement
RELATED CONTENT

Advanced defect and metrology solutions
Proceedings of SPIE (May 28 2014)
Holographic microscopy in low coherence
Proceedings of SPIE (March 09 2016)
Inspection of a class of industrial objects using a dense...
Proceedings of SPIE (February 01 1991)
Aspects of probing on the micro scale
Proceedings of SPIE (December 28 2010)

Back to Top