On the characterization of ultra-precise XUV-focusing mirrors by means of slope- measuring deflectometry

Frank Siewert; Jana Buchheim; Grzegorz Gwalt; Jens Viefhaus

doi:10.1117/12.2529308

9 September 2019 On the characterization of ultra-precise XUV-focusing mirrors by means of slope- measuring deflectometry

Frank Siewert, Jana Buchheim, Grzegorz Gwalt, Jens Viefhaus

Author Affiliations +

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 111090N (2019) https://doi.org/10.1117/12.2529308
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Slope-measuring deflectometry allows the non-contact measurement of curved surfaces such as ultra-precise elliptical cylindrical mirrors used for the focusing of synchrotron light. This paper will report on the measurement of synchrotron mirrors designed to guide and focus synchrotron light in the variable polarization beamline P04 at the PETRA III synchrotron at DESY (Hamburg). These mirrors were optimized by deterministic finishing technology based on topography data provided by slope-measuring deflectometry. We will show the results of the mirror inspection and discuss the expected beamline performance by ray-tracing results.

Conference Presentation

Citation Download Citation

Frank Siewert, Jana Buchheim, Grzegorz Gwalt, and Jens Viefhaus "On the characterization of ultra-precise XUV-focusing mirrors by means of slope- measuring deflectometry", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090N (9 September 2019); https://doi.org/10.1117/12.2529308

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available