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9 September 2019 Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station
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Abstract
The Transmission X-ray Microscope (TXM) at beamline 32-ID-C of the Advanced Photon Source (APS) is a high throughput instrument with high spatial resolution for operando nano-tomography experiments [1]. Recently, a flexural nanopositioning stage system has been designed, and constructed at the APS for a set of JTECTM Kirkpatrick-Baez (KB) mirrors to be installed at the beamline 32-ID-C station. It will focus X-ray down to a 15-20 nm focal spot that will serve as a point source for projection microscopy. Many flexural stages in the stage system are using the same designs developed by APS for the beamline 34-ID-E [2]. However, the new stage system configuration is optimized for the operation conditions at the APS 32-ID-C to accommodate large nano-tomography sample stages. The experiences gained from this new flexural nanopositioning stage system design will benefit designs of K-B mirror nanofocusing stages for other x-ray nanoprobe beamline instruments at the APS-Upgrade project, especially for the In-Situ Nanoprobe instrument design. The mechanical design of the flexural stages, as well as its preliminary mechanical test results with laser interferometer are described in this paper.
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Deming Shu, Vincent De Andrade, Jayson Anton, Steven Kearney, Kamel Fezzaa, Sunil Bean, Alex Deriy, Wenjun Liu, Jorg Maser, Barry Lai, Jonathan Z. Tischler, and Francesco De Carlo "Mechanical design of a flexural nanopositioning stage system for hard x-ray nanofocusing at the Advanced Photon Source 32-ID-C station", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120N (9 September 2019); https://doi.org/10.1117/12.2529384
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