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9 September 2019 High-resolution nano-imaging with transmission nanofocus x-ray source (Conference Presentation)
Anasuya Adibhatla, Tomi Tuohimaa, Fei Yang
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Proceedings Volume 11112, X-Ray Nanoimaging: Instruments and Methods IV; 111120Q (2019) https://doi.org/10.1117/12.2528469
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States
Abstract
The liquid-metal-jet technology has developed from prototypes into fully operational and stable X-ray tubes running in many labs over the world. Key applications include X-ray diffraction and scattering, but recently several publications have also shown very impressive X-ray computed tomography results using the liquid-metal-jet anode technology. Based on these developments of advanced electron optics, a new nanofocus x-ray tube is developed. The foundation of the new nanofocus x-ray tube is the advanced electron optics, combined with a tungsten coated diamond transmission target. The new nanofocus x-ray tube is designed to reach line-spacing resolution of 150 nm. The new nanofocus x-ray tube furthermore has the unique feature that it internally measures and reports the current spot size before each scan is stared – which is of course of great importance to understand the best achievable resolution. The presentation will include unique work done by various users using Excillum's Nanotube for nano CT and imaging of variety of organic and inorganic materials. The applications include imaging of computer chips for counterfeit, nanoCT of worms to study their locomotive mechanisms and nano CT of first Diatom and study of its shell and core.
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Anasuya Adibhatla, Tomi Tuohimaa, and Fei Yang "High-resolution nano-imaging with transmission nanofocus x-ray source (Conference Presentation)", Proc. SPIE 11112, X-Ray Nanoimaging: Instruments and Methods IV, 111120Q (9 September 2019); https://doi.org/10.1117/12.2528469
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KEYWORDS
Nanoimaging
X-rays
X-ray sources
X-ray computed tomography
X-ray optics
Prototyping
Scattering
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