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9 September 2019 Fabrication and diffraction efficiency of a 160-nm period x-ray reflection grating produced using thermally activated selective topography equilibration
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Abstract
We have fabricated a blazed X-ray reflection grating with a period of 160 nm using thermally activated selective topography equilibration (TASTE). The grating was tested for diffraction efficiency using the soft X-ray reflectometer at Lawrence Berkeley National Laboratory's Advanced Light Source. Preliminary results show total absolute diffraction efficiency ≥ 40% at lower energies, with maximum single order diffraction efficiency ranging from 20-40%. Total diffraction efficiency was ≥ 30% across the entire measured band pass of 180 eV to 1300 eV.
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Ross C. McCurdy, Randall L. McEntaffer, Jake A. McCoy, and Drew M. Miles "Fabrication and diffraction efficiency of a 160-nm period x-ray reflection grating produced using thermally activated selective topography equilibration", Proc. SPIE 11119, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IX, 111190Y (9 September 2019); https://doi.org/10.1117/12.2530052
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Cited by 2 scholarly publications.
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