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11 October 1989 Metrology Employing Deformable Optics (MEDO)
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Abstract
A technique is presented for the automated metrology of difficult to manufacture (large, highly aspheric, very precise) optics. This technique is termed MEDO- Metrology Employing Deformable Optics. It employs an Electrostatic Membrane Reflector (EMR) as the reference surface in a Twyman-Green interferometer, in combination with a commercially-available Phase Measuring Interferometer for automated data reduction. An analysis of the useful range of this proposed instrument indicates that it would, indeed, speed the production of many currently envisioned optics.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Burke E. Nelson and Dennis Mihora "Metrology Employing Deformable Optics (MEDO)", Proc. SPIE 1113, Reflective Optics II, (11 October 1989); https://doi.org/10.1117/12.955589
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