11 October 1989 Surface Flatness Measurement System
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Abstract
We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Wakana, S. Wakana, M. Inada, M. Inada, Y. Goto, Y. Goto, M. Nakashima, M. Nakashima, } "Surface Flatness Measurement System", Proc. SPIE 1113, Reflective Optics II, (11 October 1989); doi: 10.1117/12.955591; https://doi.org/10.1117/12.955591
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