The impact and origins of non-stoichiometry on the laser performance of ion beam sputtering deposited hafnia films (Conference Presentation)

Colin Harthcock; Roger Qiu; Paul Mirkarimi; Raluca Negres; Gabe Guss; Marlon Menor; Gourav Bhowmik; Mengbing Huang

doi:10.1117/12.2537142

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26 November 2019 The impact and origins of non-stoichiometry on the laser performance of ion beam sputtering deposited hafnia films (Conference Presentation)

Colin Harthcock, Roger Qiu, Paul Mirkarimi, Raluca Negres, Gabe Guss, Marlon Menor, Gourav Bhowmik, Mengbing Huang

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Proceedings Volume 11173, Laser-induced Damage in Optical Materials 2019; 111730Q (2019) https://doi.org/10.1117/12.2537142
Event: SPIE Laser Damage, 2019, Broomfield (Boulder area), Colorado, United States

Abstract

We compare the distribution of hafnia chemistries as a function of sun and planet position in an ion beam sputtering system. Hafnia film chemistries were investigated both without and with planetary rotation. In the former case, the film thickness, stoichiometries and entrapped argon varied drastically as a function of sun position, with one sun position exhibiting high entrapped argon content. With full planetary rotation used during deposition, the film stoichiometry is nearly ideal with 6% entrapped argon content. It is observed that the center of the planets is an exception, with a slightly metallic stoichiometry and high entrapped argon. Interestingly, all hafnia optical films produced in this study exhibit an inverse relationship between oxygen content and entrapped argon.

Conference Presentation

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Colin Harthcock, Roger Qiu, Paul Mirkarimi, Raluca Negres, Gabe Guss, Marlon Menor, Gourav Bhowmik, and Mengbing Huang "The impact and origins of non-stoichiometry on the laser performance of ion beam sputtering deposited hafnia films (Conference Presentation)", Proc. SPIE 11173, Laser-induced Damage in Optical Materials 2019, 111730Q (26 November 2019); https://doi.org/10.1117/12.2537142

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