Wavefront improvement by IBF-processed correction surfaces

Roman Feldkamp

doi:10.1117/12.2536776

15 November 2019 Wavefront improvement by IBF-processed correction surfaces

Roman Feldkamp

Proceedings Volume 11175, Optifab 2019; 111750L (2019) https://doi.org/10.1117/12.2536776
Event: SPIE Optifab, 2019, Rochester, New York, United States

Abstract

Within the modern production of high-precision optics, Ion Beam Figuring (IBF) is an established machining process. IBF uses an ion beam with a Gaussian particle distribution. Atoms are sputtered from the workpiece surface by accelerated ions. Compared to other correction methods (e.g. MRF) IBF provides a significantly smaller tool, enabling precise and deterministic results. The machining takes place contactless in vacuum. Thus the technology qualifies for many unique application possibilities in the production of high performance optics. After a brief introduction to the basics of IBFtechnology, this article features various industrial applications: The nanometer accurate correction of optical surfaces, the correction of angular errors as well as smoothing, structuring and decoating of lenses will be presented. Focus of the lecture is the improvement of wavefronts in optical systems using IBF-processed correction surfaces. The complete process is presented and illustrated with examples and results.

Conference Presentation

Citation Download Citation

Roman Feldkamp "Wavefront improvement by IBF-processed correction surfaces", Proc. SPIE 11175, Optifab 2019, 111750L (15 November 2019); https://doi.org/10.1117/12.2536776

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