Sub-angstrom surface roughness metrology with the white light interferometer

Shawn Iles; Jayson Nelson

doi:10.1117/12.2536683

15 November 2019 Sub-angstrom surface roughness metrology with the white light interferometer

Shawn Iles, Jayson Nelson

Proceedings Volume 11175, Optifab 2019; 1117519 (2019) https://doi.org/10.1117/12.2536683
Event: SPIE Optifab, 2019, Rochester, New York, United States

Abstract

High efficiency surfaces for low loss or high-power laser applications require extremely sensitive instrumentation to measure. Because these sub-angstrom surfaces push the limits of current optical profilers and atomic force microscopes great care must be taken to ensure the accuracy of surface roughness measurements. This paper will explain the techniques required to optimize the performance of the optical profiler and, most importantly, will explain the absolute necessity of understanding the spatial frequency bandwidth which creates the roughness value. It will be shown that this bandwidth defines instrument capabilities and facilitates data correlation between vastly different metrology instrumentation.

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Shawn Iles and Jayson Nelson "Sub-angstrom surface roughness metrology with the white light interferometer", Proc. SPIE 11175, Optifab 2019, 1117519 (15 November 2019); https://doi.org/10.1117/12.2536683

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