AlGaN/GaN HEMTs for the purposes of electronic applications

Piotr A. Caban; Marek Wojcik; Jaroslaw Gaca; Piotr Knyps; Dominika Teklinska; Ewa Dumiszewska

doi:10.1117/12.2536751

6 November 2019 AlGaN/GaN HEMTs for the purposes of electronic applications

Piotr A. Caban, Marek Wojcik, Jaroslaw Gaca, Piotr Knyps, Dominika Teklinska, Ewa Dumiszewska

Proceedings Volume 11176, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019; 111764Z (2019) https://doi.org/10.1117/12.2536751
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019, 2019, Wilga, Poland

Abstract

Aluminium nitride is particularly interesting due to its unique properties such as a wide and direct band gap as well as high thermal conductivity. High quality AlN epitaxial layers are needed in UV devices and are used as a buffer layer in the deposition of HEMTs. Its quality has an impact on further deposition as well as two dimensional electron gas properties for AlGaN/GaN HEMTs. It was observed that AlN has crucial impact on electrical as well as structural properties of AlGaN/GaN heterostructures.

Citation Download Citation

Piotr A. Caban, Marek Wojcik, Jaroslaw Gaca, Piotr Knyps, Dominika Teklinska, and Ewa Dumiszewska "AlGaN/GaN HEMTs for the purposes of electronic applications", Proc. SPIE 11176, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019, 111764Z (6 November 2019); https://doi.org/10.1117/12.2536751

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available