Thin film capacitors made of various metals for impedance sensing technique

D. Zarzeczny

doi:10.1117/12.2536787

6 November 2019 Thin film capacitors made of various metals for impedance sensing technique

D. Zarzeczny

Proceedings Volume 11176, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019; 1117654 (2019) https://doi.org/10.1117/12.2536787
Event: Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019, 2019, Wilga, Poland

Abstract

The article is devoted to measuring matrices that can be used to determine the impact of a given material on a biological substance in BioMEMS devices. The focus is on the use of the ECIS system. The test consists in measuring the impedance of cells through which a low-current current is passed. As part of the conducted research, based on the commercial matrixes of the ECIS system, special test plates were designed and made on a biocompatible polycarbonate substrate. Titanium, nichrome, nickel and copper were used. The first measurements characterizing the structures made were carried out.

Citation Download Citation

D. Zarzeczny "Thin film capacitors made of various metals for impedance sensing technique", Proc. SPIE 11176, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2019, 1117654 (6 November 2019); https://doi.org/10.1117/12.2536787

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