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26 October 1989 Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors
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Abstract
Small models (7.5-cm dia.) of lightweight Si/SiC mirrors have been fabricated via a scalable chemical vapor deposition process. These mirrors consist of a low f-number (f/1.6), concave faceplate of SiC coated with CVD Si, and a lightweight back-up structure made of SiC. The lightweight structure consists of an outer hexagonal cell with six triangular inner cells. The complete lightweight mirror substrate was fabricated directly in a CVD chamber, and no bonding agent was used to attach the SiC back-up structure to the faceplate. The Si/SiC mirrors were polished to a figure of 1/5th of a wave and a surface finish of 10 Å RMS. The CVD mirror fabrication process was scaled from a small horizontal research furnace to a vertical pilot-plant size CVD reactor. Silicon carbide depositions were successfully performed to fabricate 40-cm-diameter f/1.6 concave mirror faceplates. Currently, experiments are under way to fabricate a SiC lightweight structure on the backside of the SiC faceplate. Experimental results and important issues concerning the large scale fabrication of mirrors via CVD are discussed.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jitendra Singh Goela and Raymond L. Taylor "Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors", Proc. SPIE 1118, Space Optical Materials and Space Qualification of Optics, (26 October 1989); https://doi.org/10.1117/12.960943
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