Transient microscopic testing method based on deflectometry

Hanting Gu; Daodang Wang; Zhongming Xie; Ming Kong; Rongguang Liang; Wentao Zhang

doi:10.1117/12.2537149

19 November 2019 Transient microscopic testing method based on deflectometry

Hanting Gu, Daodang Wang, Zhongming Xie, Ming Kong, Rongguang Liang, Wentao Zhang

Proceedings Volume 11185, Optical Design and Testing IX; 111850R (2019) https://doi.org/10.1117/12.2537149
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

The deflectometry provides an optical testing method with ultra-high dynamic range. In this paper, a microscopic testing method based on deflectometric technique is proposed to quantitatively evaluate the microstructures according to the wavefront aberration. To achieve the real-time and accurate wavefront testing for microstructure evaluation, a colorcoded phase-shifting fringe pattern is applied to illuminate the test object. It avoids the sequential projection of multistep phase-shifting fringes in traditional deflectometry, enabling the transient wavefront testing. The feasibility of the proposed transient microscopic testing method is demonstrated by the experiment. The proposed method enables accurate and transient testing of microstructures with high dynamic range, minimizing the environmental disturbance.

Citation Download Citation

Hanting Gu, Daodang Wang, Zhongming Xie, Ming Kong, Rongguang Liang, and Wentao Zhang "Transient microscopic testing method based on deflectometry", Proc. SPIE 11185, Optical Design and Testing IX, 111850R (19 November 2019); https://doi.org/10.1117/12.2537149

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