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18 November 2019 Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses
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Abstract
As the digital projector develops, fringe projection profilometry has been widely used in the fast 3D measurement. However, the field of view of traditional 3D measurement systems is commonly in decimeters, which limits the 3D reconstruction accuracy to tens of microns. If we want to improve the accuracy further, we have to minimize the field of view and meanwhile increase the fringe density in space. For this purpose, we developed two kinds of systems based on a stereo-microscope and telecentric lenses, respectively. We also studied the corresponding calibration frameworks and developed fast 3D measurement methods with both Fourier transform and phase- shifting algorithms for real-time 3D reconstruction of micro-scale objects.
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Yan Hu, Yichao Liang, Tianyang Tao, Wei Yin, Jiaming Qian, Shijie Feng, Chao Zuo, and Qian Chen "Microscopic fringe projection profilometry comparison based on stereoscopic microscope and telecentric lenses", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118909 (18 November 2019); https://doi.org/10.1117/12.2537483
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