Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration and new directions

J. W. McBride; K. J. Cross; T. G. Bull

doi:10.1117/12.2540438

18 November 2019 Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration and new directions

J. W. McBride, K. J. Cross, T. G. Bull

Author Affiliations +

Proceedings Volume 11189, Optical Metrology and Inspection for Industrial Applications VI; 111890S (2019) https://doi.org/10.1117/12.2540438
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

An overview is provided of the non-contact measurement of surface morphology, focusing on form and roughness. Existing methods considered include con-focal scanning methods for the evaluation of large-scale surfaces where comparisons are drawn with direct areal measurements where data stitching is required to provide coverage of large scale surfaces. The applications of large-scale surfaces presented include, free form dental metrology, paleontology and early cylindrical mechanical sound recordings. Data registration of free form surfaces is presented to determine low scale wear of dental surfaces. For the new directions, consideration is given to the application of precision X-ray computer tomography, to determine free form surfaces and applied to the dental surfaces. The results show that the con-focal method remains the best solution for complex free form surfaces and that the XCT systems while offering some advantages require further research for full application.

Citation Download Citation

J. W. McBride, K. J. Cross, and T. G. Bull "Optical metrology for the morphological characterization of surfaces: limitations, innovations, registration and new directions", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 111890S (18 November 2019); https://doi.org/10.1117/12.2540438

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