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18 November 2019 Experimental study on defect detection method for spherical surface
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Abstract
With the development of optical manufacturing and measurement methods, precision optical elements are used extensively in various fields. As the beam scattering and energy loss caused by the surface defects of optical elements will reduce the lifetime of optical elements and the performance of optical systems, it is important to detect and evaluate the surface defects. However, several technical challenges remain in the surface defect detection of spherical optical elements. In this paper, a spherical defect detection experiment based on the dark-field imaging principle is proposed. The surfaces of two convex spherical optical elements are detected. Meanwhile, the illumination module is improved through experiments. The experimental results are compared with those of a white light interferometer, thereby demonstrating the validity of the method.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
ChengRui Li, Xi Hou, XiaoSong Du, HaiYang Quan, and XiaoChuan Hu "Experimental study on defect detection method for spherical surface", Proc. SPIE 11189, Optical Metrology and Inspection for Industrial Applications VI, 1118911 (18 November 2019); https://doi.org/10.1117/12.2538863
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