Surface Anisotropy Measurements By Ellipsometry

J. P. Marton

doi:10.1117/12.955546

19 October 1977 Surface Anisotropy Measurements By Ellipsometry

J. P. Marton

Proceedings Volume 0112, Optical Polarimetry: Instrumentation and Applications; (1977) https://doi.org/10.1117/12.955546
Event: 21st Annual Technical Symposium, 1977, San Diego, United States

Abstract

Surface anisotropy of an otherwise isotropic solid may be the result of surface contamination or surface aggregation. In the latter case, an analysis of the degree of aggregation, its depth, and the nature of the aggregates is possible by the recently developed "generalized" Maxwell Garnett Theory. In order to carry out the analysis the effective indices of refraction are needed, which can be measured accurately with the ellipsometer at different angles of incidence. Details of the analysis and examples, using some metals and silicon will be presented.

Citation Download Citation

J. P. Marton "Surface Anisotropy Measurements By Ellipsometry", Proc. SPIE 0112, Optical Polarimetry: Instrumentation and Applications, (19 October 1977); https://doi.org/10.1117/12.955546

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