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16 October 2019 Verification of the direct measurement principle of linear velocity using Sagnac effect
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Proceedings Volume 11205, Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019); 1120508 (2019) https://doi.org/10.1117/12.2541627
Event: Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019), 2019, Phuket, Thailand
Abstract
With the development of technology, the demands for high-speed and high-precision processing for fabricating precision parts such as semiconductors and liquid crystals have been increasing. However, there is a problem that vibrations occur in ultra-precision machines. However, in order to improve machining accuracy, it is necessary to suppress the vibration of the machine tool. In a vibration control system, vibration is reduced by speed feedback. In the conventional method, speed control is performed by integrating acceleration. Therefore, there is a problem that the error is accumulated and the accuracy of measurement speed is reduced. Currently, linear velocity can’t be measured directly without reference point, while angular velocity can be measured directly without reference. The angular velocity can be measured directly using the Sagnac effect, which is the basis of the optical gyro. Then, in this research, in order to realize the linear velocity measurement method which does not cause an error theoretically, we verified about the direct measurement principle of linear velocity using Sagnac effect.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ryo Nagakubo, Kodai Iwata, and Hiroshi Sawano "Verification of the direct measurement principle of linear velocity using Sagnac effect", Proc. SPIE 11205, Seventh International Conference on Optical and Photonic Engineering (icOPEN 2019), 1120508 (16 October 2019); https://doi.org/10.1117/12.2541627
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