Design and finite element analysis of a vacuum chuck for weak rigid body parts

Guanyu Zhou; Wei Wang; Lingbao Kong; Min Xu

doi:10.1117/12.2543886

20 December 2019 Design and finite element analysis of a vacuum chuck for weak rigid body parts

Guanyu Zhou, Wei Wang, Lingbao Kong, Min Xu

Proceedings Volume 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019); 112091A (2019) https://doi.org/10.1117/12.2543886
Event: Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 2019, Xi'an, China

Abstract

In order to measure the figure change of weak rigid body parts by a 4D interferometer, a groove ring vacuum chuck is designed to easily absorb the weak rigid body parts. Using the vacuum chuck to adsorb the object could keep it even under the force and maintain stable. Based on the principle of vacuum chuck technology, we use a 3D visual solid simulation software called Inventor to model the chuck, then use finite element software ANSYS to solve fluid dynamics and structural static analysis of the vacuum chuck. Different parameters that affect the performance of the chuck are analyzed, and the optimum values of these parameters are hence obtained, which provide an important means for designing the vacuum chuck to hold weak rigid body parts for further precision measurement or processing.

Citation Download Citation

Guanyu Zhou, Wei Wang, Lingbao Kong, and Min Xu "Design and finite element analysis of a vacuum chuck for weak rigid body parts", Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112091A (20 December 2019); https://doi.org/10.1117/12.2543886

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