Automated Phase-Measuring Interferometry With A Frequency-Modulated Laser Diode

Yukihiro Ishii

doi:10.1117/12.961257

3 April 1989 Automated Phase-Measuring Interferometry With A Frequency-Modulated Laser Diode

Yukihiro Ishii

Author Affiliations +

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961257
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

A Twyman-Green heterodyne interferometer with a laser diode source was constructed for testing an optical element. The wavelength induced by laser injection current is continuously changed to introduce a time-varying phase difference between the two beams of an interferometer with an unbalanced optical path length. An automated phase-measuring interferometric system was developed in which the laser current is changed to synchronize intensity data acquisition with vertical drive pulses of a charge-coupled device (CCD). The intensity of interference pattern is integrated with a CCD detector for intervals of one-quarter period of one fringe. A microcomputer calculates the phase to be detected. The experimental results are shown to measure the profile of a diamond-turned Al surface; the rms repeatability of λ/105 was obtained.

Citation Download Citation

Yukihiro Ishii "Automated Phase-Measuring Interferometry With A Frequency-Modulated Laser Diode", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961257

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE