3 April 1989 Electrooptical Incremental Measuring System
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Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961338
Event: Interferometry '89, 1989, Warsaw, Poland
Abstract
Artical is dedicated to solving some problems connected with lanufacturing accurate master scales with standard graduation of 10 μm - master scales making and checking on machine controlled by laserinterferometer - achievment the best quality of photoprocess
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Milan Suchomel, Jiri Wurtherle, "Electrooptical Incremental Measuring System", Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961338; https://doi.org/10.1117/12.961338
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