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3 April 1989 Electrooptical Incremental Measuring System
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Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961338
Event: Interferometry '89, 1989, Warsaw, Poland
Abstract
Artical is dedicated to solving some problems connected with lanufacturing accurate master scales with standard graduation of 10 μm - master scales making and checking on machine controlled by laserinterferometer - achievment the best quality of photoprocess
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Milan Suchomel and Jiri Wurtherle "Electrooptical Incremental Measuring System", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961338
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