3 April 1989 On-Axis Interferometric Measurement For Tool Positioning In Ultra-Precision Single-Point Machining
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Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961278
Event: Interferometry '89, 1989, Warsaw, Poland
Abstract
As part of a programme of research into single-point diamond machining to cut-depths of the order of 100nm using an ultra-precision lathe, it was required to continuously monitor and control the axial position of the tool when used in the facing mode. This was done in combination with interferometric monitoring of the rotating spindle/face-plate. Two versions of combined interferometer and piezoelectric actuator are described in which the tool in-feed and optical axes are colinear. In the second version, the tool position is made with measurement interferometrically with respect to the rotating surface.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. E. Gee, A. E. Gee, S. G. McCandlish, S. G. McCandlish, K. E. Puttick, K. E. Puttick, "On-Axis Interferometric Measurement For Tool Positioning In Ultra-Precision Single-Point Machining", Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961278; https://doi.org/10.1117/12.961278
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