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3 April 1989 Simulating The Profilometric Measurement Using A Computer Generated Profile
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Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961256
Event: Interferometry '89, 1989, Warsaw, Poland
Abstract
A correlated profile with normal distributed ordinates was computer-generated and the interferometrical measuring process of surface microprofilometry was simulated for a simultaneously measuring interference microscope with a CCD-row and and a profilometer measuring point-by-point. The dependence of the short and high spatial frequency bandlimit on the measured profile and the calculated roughness parameters and statistical functions are shown.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Harnisch and Horst Truckenbrodt "Simulating The Profilometric Measurement Using A Computer Generated Profile", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961256
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