Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview

Mitsuo Takeda

doi:10.1117/12.961253

3 April 1989 Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview

Mitsuo Takeda

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961253
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

An overview is given on the principle and the recent development of the spatial-carrier fringe-pattern analysis techniques, and their application areas are introduced.

Citation Download Citation

Mitsuo Takeda "Spatial Carrier Heterodyne Techniques For Precision Interferometry And Profilometry: An Overview", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961253

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